Truong VDT, Le TTA, Nguyen HN, Huynh HT, Pham TKH. Dependence of Structural and Electrical Properties of Sputtered-Fe3O4 Thin Films on Gas Flow Rate. JTE [Internet]. 2022 Oct. 28 [cited 2026 Apr. 7];17(5):34-8. Available from: https://www.jte.edu.vn/index.php/jte/article/view/1237