The study of structural and fabrication for 385nm-415nm UV LED
Corressponding author's email:
quangbv@hcmute.edu.vnKeywords:
UV LED, MOCVD, Multi Quantum Wells (MQWs), SterilizingAbstract
This report focuses to find out the emission mechanisms for Nitride semiconductor, multi-quantum wells structures for ultraviolet radiation, study about thin film technology on the equipment of Metal- Organic Chemical Vapor Deposition (MOCVD). We calculate the physical and optical properties for 2 potential UVLED structures by SiLENse software and other mathematical formulas. Their fabrication process also was studied by Intellisuite software, which is the easy way for educational purpose. Finally, we propose some ideas for the UVLED manufacture process in Saigon Hi-Tech Park (SHTP, Vietnam), where owned the MOCVD equipment in Vietnam.
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