Sputtered ZnO Rods/Film Structure on Different Substrates

Các tác giả

Email tác giả liên hệ:

hangptk@hcmute.edu.vn

DOI:

https://doi.org/10.54644/jte.2024.1403

Từ khóa:

Zinc Oxide, ZnO nanorod, RF-magnetron sputtering, Substrate effect, UV detectors

Tóm tắt

The wide investigation of zinc oxide (ZnO) nanorods is primarily driven by their exceptional utility in several industries, such as solar cells, sensors, photodetectors, photocatalysts, microchip technology, and piezoelectric transducers. There has been a growing focus in environmental defense applications on the use of ZnO nanorods as photocatalysts. This investigation discusses the growth of ZnO rods on ZnO films using the radio-frequency magnetron sputtering method at a temperature of 400 °C. The growth was performed on several substrates including Si (100), Si (111), and SiO2 substrates. A careful examination was conducted to examine the influence of the substrate on the structure and surface morphology of ZnO rods/film. Based on the X-ray diffraction patterns, it was seen that both the films and rods exhibited a high degree of crystallinity and exhibited a wurtzite structure. Furthermore, there was a preferred orientation along the (002) direction, which was perpendicular to the substrate. Scanning electron microscopy images demonstrated the significant effect of substrates on both the thickness of ZnO films and the length of rods. The findings indicated that these structures were well-suited for several applications, including thermionic/field emission, solar cells, UV detectors, and gas sensors.

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Tiểu sử của Tác giả

Van Tri Le, Ho Chi Minh City University of Technology and Education, Vietnam

Le Van Tri is a third-year student of Faculty of Applied Sciences at HCMUTE, Vietnam, whose major is Materials Technology. His engrossed research is ZnO’s properties and the influences on ZnO nanorods. Email: 20130073@student.hcmute.edu.vn. ORCID:  https://orcid.org/0009-0003-5900-2377

Phan Tan Sang Ho, Ho Chi Minh City University of Technology and Education, Vietnam

Ho Phan Tan Sang is a third-year student of Faculty of Applied Sciences at HCMUTE, Vietnam, whose major is Materials Technology. His engrossed research is ZnO’s properties and the influences on ZnO nanorods. Email: 20130057@student.hcmute.edu.vn. ORCID:  https://orcid.org/0009-0001-6417-4064

Bao Quan Tran, Ho Chi Minh City University of Technology and Education, Vietnam

Tran Bao Quan is a third-year student of Faculty of Applied Sciences at HCMUTE, Vietnam, whose major is Materials Technology. He engrossed research is ZnO’s properties and the influences on ZnO nanorods. Email: baoquan789@gmail.com. ORCID:  https://orcid.org/0009-0007-5263-3087

Hoang Trung Huynh, Ho Chi Minh City University of Technology and Education, Vietnam

Huynh Hoang Trung obtained his MS. degree from Ho Chi Minh City National University, University of Science in 2008. He has expertise not only in the fabrication of thin films using various deposition methods such as sol-gel, thermal evaporation, sputtering, and chemical vapor deposition, but also in working with electronic devices such as ultraviolet light-emitting diodes and transistors, which have been published in both national and international journal articles. Email: trunghh@hcmute.edu.vn. ORCID:  https://orcid.org/0009-0003-1358-6872

Hai Dang Ngo, Ho Chi Minh City University of Technology and Education, Vietnam

Ngo Hai Dang received Ms degree at Ajou university, Suwon, Korea and PhD degree at Hokkaido university, Sapporo, Japan. His interest focuses on optical, electrical properties of thin films and low dimentional systems. Currently, he serves as lecturer at University of Technology and Education, HoChiMinh city, Viet Nam. Email: dangnh@hcmute.edu.vn. ORCID:  https://orcid.org/0000-0002-6205-0850

Thi Kim Hang Pham, Ho Chi Minh City University of Technology and Education, Vietnam

Pham Thi Kim Hang received her MS. degree from the Institute of Physic, Hanoi, Vietnam in 2011 and then achieved a PhD. degree from Ewha University, Korea in 2019. She has a lot of experience in fabricating and characterizing many magnetic and semiconductor materials using physical deposition techniques. Email: hangptk@hcmute.edu.vn. ORCID:  https://orcid.org/0009-0000-4865-3420

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Tải xuống

Đã Xuất bản

2024-08-28

Cách trích dẫn

[1]
Van Tri Le, Phan Tan Sang Ho, Bao Quan Tran, Hoang Trung Huynh, Hai Dang Ngo, và Thi Kim Hang Pham, “Sputtered ZnO Rods/Film Structure on Different Substrates”, JTE, vol 19, số p.h Special Issue 03, tr 1–6, tháng 8 2024.

Số

T. 19 S. Special Issue 03 (2024)

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