Influence of Growth Temperature on Morphological and Structural Properties of Sputtered- Zinc Oxide Nanorods
Corressponding author's email:
hangptk@hcmute.edu.vnDOI:
https://doi.org/10.54644/jte.2024.1404Keywords:
Zinc Oxide, ZnO nanorods, Nanostructure, RF-magnetron sputtering, Growth temperatureAbstract
Zinc oxide is highly sought after for several applications in biology, optoelectronics, electronics, and sensing. Zinc oxide nanorods exhibit a high exciton binding energy and a wide direct band gap, making them an attractive material for ultraviolet optoelectronic devices in the compound semiconductor field. This investigation focuses mainly on the influence of growing temperature on the crystal structure and surface morphology of ZnO nanorods, specifically for their application as UV photodetectors. Si (100) substrates were utilized for the growth of ZnO nanorods using radio frequency magnetron sputtering. The ZnO nanorods are grown at temperatures of 350 °C, 375 °C, and 400 °C, respectively. The crystal structure and surface morphology were examined using X-ray diffraction and scanning electron microscopy. The samples exhibited a same crystal orientation of the (002) diffraction peak at all growth temperatures. The growth temperatures show a direct influence on the density and length of nanorods, as evidenced by the scanning electron microscopy photographs. The results revealed the significant influence of substrate temperature on the regulation of nanorod length and crystal formation.
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References
C. W. Litton, D. C. Reynolds, and T. C. Collins, Zinc Oxide Materials for Electronic and Optoelectronic Device Applications. John Wiley and Sons Ltd, 2011. DOI: https://doi.org/10.1002/9781119991038
Ü. Özgür, Y. I. Alivov, C. Liu, A. Teke, M. A. Reshchikov, S. Doǧan, V. Avrutin, S. J. Cho, and H. Morkoç, “A comprehensive review of ZnO materials and devices,” J. Appl. Phys., vol. 98, 2005, Art. no. 041301. DOI: https://doi.org/10.1063/1.1992666
Y. Ni, X. Wei, J. Hong, and Y. Ye, “Hydrothermal preparation and optical properties of ZnO nanorods,” Mater. Sci. Eng. B, vol. 121, no. 1–2, pp. 42–47, Jul. 2005. DOI: https://doi.org/10.1016/j.mseb.2005.02.065
J. Song, S. Baek, and S. Lim, “Effect of hydrothermal reaction conditions on the optical properties of ZnO nanorods,” Physica B: Condens. Matter, vol. 403, no. 10–11, pp. 1960–1963, May 2008. DOI: https://doi.org/10.1016/j.physb.2007.10.337
Y. W. Heo, L. C. Tien, and D. P. Norton, “Electrical transport properties of single ZnO nanorods,” Appl. Phys. Lett., vol. 85, 2002, 2004. DOI: https://doi.org/10.1063/1.1792373
D. A. Scrymgeour and J. W. P. Hsu, “Correlated piezoelectric and electrical properties in individual ZnO nanorods,” Nano Lett., vol. 8, no. 8, pp. 2204–2209, 2008. DOI: https://doi.org/10.1021/nl080704n
S. L. Ou, D. S. Wuu, S. P. Liu, Y. C. Fu, S. C. Huang, and R. H. Horng, “Pulsed laser deposition of ITO/AZO transparent contact layers for GaN LED applications,” Opt. Express, vol. 19, pp. 16244–16251, 2011. DOI: https://doi.org/10.1364/OE.19.016244
H. H. Li, P. Y. Yang, S. M. Chiou, H. W. Liu, and H. C. Cheng, “A novel coaxial-structured amorphous-silicon p-i-n solar cell with Al-doped ZnO nanowires,” IEEE Electron Device Lett., vol. 32, no. 7, pp. 928–930, Jul. 2011, doi: 10.1109/LED.2011.2146752. DOI: https://doi.org/10.1109/LED.2011.2146752
Z. L. Wang and J. Song, “Piezoelectric nanogenerators based on zinc oxide nanowire arrays,” Science, vol. 312, no. 5771, pp. 242–246, Apr. 2006. DOI: https://doi.org/10.1126/science.1124005
Y. Hames, Z. Alpaslan, A. Kösemen, S. E. San, and Y. Yerli, “Electrochemically grown ZnO nanorods for hybrid solar cell applications,” Sol. Energy, vol. 84, no. 3, pp. 426–431, Mar. 2010. DOI: https://doi.org/10.1016/j.solener.2009.12.013
Y. Zhang, K. Yu, D. Jiang, Z. Zhu, H. Geng, and L. Luo, “Zinc oxide nanorod and nanowire for humidity sensor,” Appl. Surf. Sci., vol. 242, no. 1–2, pp. 212–217, Mar. 2005. DOI: https://doi.org/10.1016/j.apsusc.2004.08.013
X. Liu, X. Wu, H. Cao, and R. P. H. Chang, “Growth mechanism and properties of ZnO nanorods synthesized by plasma-enhanced chemical vapor deposition,” J. Appl. Phys., vol. 95, pp. 3141–3147, 2004. DOI: https://doi.org/10.1063/1.1646440
S. R. Hejazi, H. R. Madaah Hosseini, and M. S. Ghamsari, “The role of reactants and droplet interfaces on nucleation and growth of ZnO nanorods synthesized by vapor–liquid–solid (VLS) mechanism,” J. Alloys Compd., vol. 455, no. 1–2, pp. 353–357, May 2008. DOI: https://doi.org/10.1016/j.jallcom.2007.01.100
A. Umar, S. H. Kim, Y.-S. Lee, K. S. Nahm, and Y. B. Hahn, “Catalyst-free large-quantity synthesis of ZnO nanorods by a vapor–solid growth mechanism: Structural and optical properties,” J. Cryst. Growth, vol. 282, no. 1–2, pp. 131–136, Aug. 2005. DOI: https://doi.org/10.1016/j.jcrysgro.2005.04.095
S. Swathi, E. S. Babu, R. Yuvakkumar, G. Ravi, A. Chinnathambi, S. A. Alharbi, and D. Velauthapillai, “Branched and unbranched ZnO nanorods grown via chemical vapor deposition for photoelectrochemical water-splitting applications,” Ceram. Int., vol. 47, no. 7, pp. 9785–9790, Apr. 2021. DOI: https://doi.org/10.1016/j.ceramint.2020.12.119
M. N. Kamalasanan and S. Chandra, “Sol-gel synthesis of ZnO thin films,” Thin Solid Films, vol. 288, no. 1–2, pp. 112–115, Nov. 1996. DOI: https://doi.org/10.1016/S0040-6090(96)08864-5
R. Nandi and S. S. Major, “The mechanism of growth of ZnO nanorods by reactive sputtering,” Appl. Surf. Sci., vol. 399, pp. 305–312, Mar. 2017.
D. K. Kim and C. B. Park, “Deposition of ZnO thin films on Si by RF magnetron sputtering with various substrate temperatures,” J. Mater. Sci. Mater. Electron., vol. 25, pp. 5416–5421, 2014. DOI: https://doi.org/10.1007/s10854-014-2322-3
R. Nandi and S. S. Major, “The mechanism of growth of ZnO nanorods by reactive sputtering,” Appl. Surf. Sci., vol. 399, pp. 305–312, Mar. 2017. DOI: https://doi.org/10.1016/j.apsusc.2016.12.097
E. Karaköse and H. Çolak, “Effect of substrate temperature on the structural properties of ZnO nanorods,” Energy, vol. 141, pp. 50–55, Dec. 2017. DOI: https://doi.org/10.1016/j.energy.2017.09.080
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