Sự ảnh hưởng của nhiệt độ mọc màng lên hình thái và cấu trúc của màng mỏng ZnO

Các tác giả

  • Vo Doan Thanh Truong Ho Chi Minh City University of Technology and Education, Vietnam
  • Thi Thanh Truc Nguyen Ho Chi Minh City University of Technology and Education, Vietnam
  • Thanh Lan Vo Ho Chi Minh City University of Technology and Education, Vietnam
  • Hoang Trung Huynh Ho Chi Minh City University of Technology and Education, Vietnam
  • Thị Kim Hằng Phạm Ho Chi Minh City University of Technology and Education, Vietnam

Email tác giả liên hệ:

hangptk@hcmute.edu.vn

DOI:

https://doi.org/10.54644/jte.72A.2022.1238

Từ khóa:

Zinc Oxide, ZnO, Màng mỏng, RF-magnetron sputtering, Nhiệt độ mọc màng

Tóm tắt

Kẽm oxit (ZnO) là một trong những oxit có triển vọng nhất trong ứng dụng nhiều ngành công nghiệp nhờ sở hữu các tính chất độc đáo. Nhờ có vùng cấm rộng trực tiếp (3,37 eV) và năng lượng liên kết exciton mạnh (60 meV) ở nhiệt độ thường, ZnO không chỉ dẫn điện tốt mà còn có khả năng truyền ánh sáng nhìn thấy và phát ra tia UV. Trong bài báo này, chúng tôi đã nghiên cứu ảnh hưởng của nhiệt độ mọc màng lên màng mỏng ZnO bằng cách thay đổi nhiệt độ mọc màng từ 400 oC đến 450 oC. Phún xạ magnetron tần số vô tuyến (radio-frequency - RF) được sử dụng chế tạo màng mỏng ZnO trên đế Si (100). Kết quả từ phương pháp kính hiển vi lực nguyên tử (atomic force microscopy - AFM) cho thấy độ nhám hiệu dụng (root mean square - RMS) giảm từ 6,1 ± 1,0 nm xuống 4,8 ± 0,6 nm khi nhiệt độ mọc màng tăng lên. Hình XRD cho thấy sự tăng cường cấu trúc của ZnO khi tăng nhiệt độ mọc màng. Các phát hiện của chúng tôi chỉ ra rằng việc kiểm soát nhiệt độ mọc màng là yếu tố quan trọng trong việc chế tạo màng mỏng ZnO chất lượng cao.

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Tiểu sử của Tác giả

Vo Doan Thanh Truong, Ho Chi Minh City University of Technology and Education, Vietnam

Vo Doan Thanh Truong graduated in Materials Technology from Ho Chi Minh City University of Technology and Education (HCMUTE), Vietnam with a high GPA. Her research focuses on fabricating semiconductor and magnetic thin films using physical deposition techniques and studying the effects of different factors, such as growth temperature, deposition pressure and power on thin films' properties.

Thi Thanh Truc Nguyen, Ho Chi Minh City University of Technology and Education, Vietnam

Thi Thanh Truc Nguyen is a final-year student of Faculty of Applied Sciences at HCMUTE, Vietnam, whose major is Materials Technology. Her engrossed research is ZnO’s properties and the influences on ZnO thin films.

Thanh Lan Vo, Ho Chi Minh City University of Technology and Education, Vietnam

Lan Thanh Vo is a senior majoring in Materials Technology of Faculty of Applied Sciences at HCMUTE, Vietnam. Her research focuses on ZnO materials and factors affecting ZnO thin films.

Hoang Trung Huynh, Ho Chi Minh City University of Technology and Education, Vietnam

Hoang Trung Huynh obtained his MS. degree from Ho Chi Minh City National University, University of Science in 2008. He has expertise not only in the fabrication of thin films using various deposition methods such as sol-gel, thermal evaporation, sputtering, and chemical vapor deposition, but also in working with electronic devices such as ultraviolet light-emitting diodes and transistors, which have been published in both national and international journal articles.

Thị Kim Hằng Phạm, Ho Chi Minh City University of Technology and Education, Vietnam

Thi Kim Hang Pham received her MS. degree from the Institute of Physic, Hanoi, Vietnam in 2011 and then achieved a PhD. degree from Ewha University, Korea in 2019. She has a lot of experience in fabricating and characterizing many magnetic and semiconductor materials using physical deposition techniques such as Fe3O4, IrMn3, Mn, Si, FeSi, Fe2O3, and ZnO.

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Tải xuống

Đã Xuất bản

2022-10-28

Cách trích dẫn

[1]
V. D. T. Truong, T. T. T. . Nguyen, T. L. Vo, H. T. Huynh, và T. K. H. . Phạm, “Sự ảnh hưởng của nhiệt độ mọc màng lên hình thái và cấu trúc của màng mỏng ZnO”, JTE, vol 17, số p.h 5, tr 39–44, tháng 10 2022.

Số

T. 17 S. 5 (2022)

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